| 摘要 |
PURPOSE:To prevent a blockage of a fore line to improve the rate of operation, by furnishing a water-cooling baffle with a specific structure, putting on and off freely, at an exhaust pipe connected to a chamber between a draw out electrode and a gate valve. CONSTITUTION:Metallic arsenic or the like is placed in a vaporizer 2 to evaporate, ionized by an arc container 4, accelerated by a draw out electrode 5, and injected to a substance to process through a mass analysis magnet 7. An excessive metallic vapor is introduced from a chamber 1 into an exhaust pipe 8, and converted into a metallic solid to attach to the baffle 16, by the water- cooling baffle which is installed, putting on and off freely, a the exhaust pipe 8, with the inclination of its vanes 19 convertible, and with a shaft 17 through which the cooling water can flow. And the air is exhausted through an oil scattering pump 9 to a fore line 11. Therefore, a blockage owing to a metallic solid can be prevented effectively, and the exhausting capability can be maintained for a long period of time.
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