| 摘要 |
PURPOSE:To damp and stop a moving table without shock by giving an opposite thrust having the same absolute value as the thrust at each occasion when the moving table advances beyond a designated movement area. CONSTITUTION:A coil 22 of a linear motor is fixed to the moving table on which an object to be worked or an object to be measured and is driven through an amplifier circuit 54 by a speed reference signal (vi) generated from a speed reference signal generating circuit 44. This driving controller is provided with a device 46 which measures the extent of movement of the table, a counter 48, a differentiation circuit 50 of the output of the counter 48, and a table speed signal generating circuit 52, and further, thus controller is provided with an inverting amplifier circuit 56 and a changeover switch 58. If the moving table advances beyond a movable range, it is detected to switch the switch 58 to a terminal B, and a moving speed signal v0 from the generating circuit 52 is inverted and amplified by the circuit 56 and is applied to the coil 22. Thus, a reverse current is flowed to the coil 22 to damp and stop the table without shock and without contacting.
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