| 摘要 |
PURPOSE:To decrease the fluctuation of the characteristics of a humidity sensitive element by solutionizing yttria, etc. to zirconia to form stabilized zirconia, treating the same with KOH, etc. and calcining the same thereby forming a humidity sensitive blank material. CONSTITUTION:Yttria, calcia and magnesia are solutionized to zirconia to form the stabilized zirconia powder. KOH, KO2 and K2CO3 are added to such powder to cause reaction, then the powder is calcined to form the humidity sensitive blank material. Comb-shaped electrodes (gold, ruthenium, etc.) 3 are then formed on a substance (alumina, silicon, etc.) 1. The moisture sensitive blank material premixed with an adhesive resin is coated thereon to form a humidity sensitive part 5, thereby constituting the humidity sensitive element. Since the stabilized zirconia is treated with KOH, etc. the fluctuation of the characteristics of the humidity sensitive element is decreased even at and under a high temp. and high humidity or high-temp. and low humidity and the sensitivity is stabilized. |
