发明名称 HEATING DEVICE
摘要 PURPOSE:To improve the working efficiency of a heating device by shortening the heating time and contrive to stabilize the quality of matters to be heated by holding the heating temperature and the heating temperatature and the heating time for the matter to be heated to a constant by providing the oven for heat-treating the matters to be heated with the heating means, by which the center parts of the cases housing the matters to be heated are heated to the same degree of the temperature as that of the peripheral parts thereof. CONSTITUTION:This heating device has on oven 11 provided with shelves 10, each capable of ventilating and on each of which a case 1 is placed. Partitions 12, with which a part in the oven is air-permeably sectioned from the ventilating path and which consists of a mesh and so forth are provided at the upper surface part and the lower surface part of the oven 11. The air to be fed to the oven 11 is cycle-fed from the upper surface part to the lower surface part in the oven 11. Moreover, heaters 13 to be used for heating the air to be fed to the oven 11 are provided on the partition 12 to be provided at the upper surface part. These heaters 13 are densely provided over the center parts of the case 1 to be placed on the shelves 10 and the air to be fed to the oven 11 is made higher its temperature over the center parts of the cases 1 by the heaters 13 than that over the peripheral parts thereof as shown by broken lines 14.
申请公布号 JPS61288449(A) 申请公布日期 1986.12.18
申请号 JP19850129759 申请日期 1985.06.17
申请人 TOSHIBA CORP 发明人 SHIBATA KEIICHI
分类号 H01L23/34;F27B3/08;F27D11/02 主分类号 H01L23/34
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