发明名称 FINE PARTICLE DETECTING DEVICE
摘要 PURPOSE:To reduce a particle size which can be detected without decreasing the capacity of particulate containing liquid which can be inspected within a constant time and a decrease in particle size resolution by providing a beam polarizing part which scans the liquid to be measured linearly and repeatedly with beam light. CONSTITUTION:A detecting device consists of a beam light irradiating mechanism 19 which irradiates the particulate containing liquid 2 to be measured with the beam light 6 and a photodetection mechanism 8 which photodetects scattered light emitted by particulates by the irradiation of the beam light and outputs a signal corresponding to the scattered light. Then, the irradiating mechanism 19 is provided with a beam light deflecting part 18 to scan the liquid to be measured with the beam light repeatedly. Consequently, the uniform intensity distribution area of the beam light at the part of the object liquid irradiated with the beam light is expanded in the scanning direction of the beam light, thereby eliminating the influence of the intensity distribution shape of the beam light upon the particle size resolution of the detecting device.
申请公布号 JPS61288139(A) 申请公布日期 1986.12.18
申请号 JP19850131297 申请日期 1985.06.17
申请人 FUJI ELECTRIC CO LTD 发明人 ZAITSU YASUSHI;TOYAMA FUMIO
分类号 G01N21/53;G01N15/14;G01N21/49 主分类号 G01N21/53
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