| 摘要 |
PURPOSE:To quickly heat a substrate with low energy by depositing a thin film constituting material on the substrate to be formed with the thin film while bringing said substrate into direct contact with a heater. CONSTITUTION:The thin magnetic film is formed on a high-polymer film base 6 by, for example, a high-frequency discharge type opposed target sputtering device having a pair of targets T1, T2. The base 6 is conveyed from a supply roll 11 toward a take-up roll 13 while the base is guided by a cylindrical can 13 disposed alongside both targets between the same for the above-mentioned purpose. The magnetic particles are successively deposited on the base by sputtering during this time. A flexible heater 7 is wound on the circumferential surface (e.g., the surface to contact with the base 6) of the can 12 as the guiding member under rotation and the flexible base 6 is guided while contacting directly with such heater 7. The base 6 is then quickly heated with the smaller energy and the thin film having good characteristics is efficiently obtd.
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