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发明名称
摘要
申请公布号	JPS61502994(A)	申请公布日期	1986.12.18
申请号	JP19850503494	申请日期	1985.07.29
申请人		发明人
分类号	B65G65/00;B65D85/86;B65G49/07;H01L21/67;H01L21/673;H01L21/677	主分类号	B65G65/00
代理机构		代理人
主权项
地址

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