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发明名称
摘要
申请公布号
JPS61201353(U)
申请公布日期
1986.12.17
申请号
JP19850085112U
申请日期
1985.06.04
申请人
发明人
分类号
H01L27/04;H01L21/822;H01L29/866;(IPC1-7):H01L29/90
主分类号
H01L27/04
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