| 摘要 |
PURPOSE:To obtain an oxygen sensor having good response, by forming electrodes to both sides of a ceramic substrate and further forming titania membranes on said electrodes. CONSTITUTION:Electrodes 11, 12 are formed to the left and right ends of a ceramic substrate 10 by printing, vapor deposition, chemical gaseous phase growth or sputtering and a titania membrane 13 is formed to the upper surfaces of the electrodes 11, 12 at both ends and the upper surface of the substrate 10 by sputtering. Because the titania membrane 13 is low in a volume as compared with the surface thereof, the response property as an oxygen sensor is enhanced.
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