| 摘要 |
PURPOSE:To maintain the temperature and pressure distributions during the treatment of a substrate uniform and to readily convey in or out the substrate by heating a container having horizontal racks to the prescribed temperature and driving the cover plate of an exit to close or open it. CONSTITUTION:The pitch of slits 5 of a cover plate 4 of a conveying exit of a container 1 is the same as that of racks 2, and the plate 4 is moved upward and downward by a cam 6 in cooperation with the operation of a conveyor. The racks 2 are placed with substrates to be treated, and heated. According to this construction, the temperature and pressure distributions in the container 1 become approximately uniform during the treatment of the substrate to uniformly treat the substrates and to readily convey the substrate in or out. |
