| 摘要 |
PURPOSE:To prevent the generation of the high area resonance by using the graphite which is a solid carbon source ionizing the carbon vapor in the comparatively high vacuum and further, adding the gaseous mixture of hydrogen and argon or gaseous hydrogen. CONSTITUTION:After a Ti made of diaphragm is arranged in a vacuum tank 1 and evacuated to 10<-6>Torr, a graphite 5 is evaporated, in a crucible 4 by using an electronic beam 3, simultaneously, the voltage of the direct current 50V is impressed to an ionizing electrode 6 arranged on the upper part of the crucible 4, the prescribed electric power is inputted even to a thermal electronic discharging filament 7 arranged between the crucible 4 and the ionizing electrode 6, and the evaporated carbon is ionized. Thereafter, into the vacuum tank, the gaseous mixture of hydrogen and argon is introduced, the voltage of the direct current -100--1kV is impressed to the substrate, a shutter 8 is opened and the membrane is formed on a substrate 2. As the membrane forming speed, the scope of 0.02-0.1mum/min, is desirable. |
