| 摘要 |
PURPOSE:To enable the automatic attachment and detachment or exchange by arranging many holes on a probe card and the positioning or the electrical connection with external devices is carried out by using said holes. CONSTITUTION:A probe card substrate 1 is composed of a double-side printed wiring board and it is provided with connector holes 2 corresponding to a probe 5 attached in the center, conductive patterns 3 leading to the attachment position of the probe 5, and conductive through-holes 4. The connector holes 2 are arranged straight in the respective circumferential parts of the substrate 1 and the conductive patterns 3 from the connector holes 2 are led out to the front and back sides alternately. The conductive through-holes 4 are provided for leading out the conductive patterns 3 to the surface. Connection pins 71 individually corresponding to the connector holes 2 are attached to a main body 7 of a prober and the connection pins 71 are engaged in the corresponding connector holes 2 respectively, thereby attaining the positioning of the probe card and the electrical connection with the main body 7. Thus, the automatic attachment and detachment or exchange by use of a machine becomes possible and the position adjustment after the attachment or exchange becomes unnecessary.
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