| 发明名称 |
Plasma emission source |
| 摘要 |
An impedance matching network for continuously and automatically maximizing RF power transfer to a plasma emission torch includes a dual phase detector network. Signals from the detector network control, via a control unit, a variable impedance network.
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| 申请公布号 |
US4629940(A) |
申请公布日期 |
1986.12.16 |
| 申请号 |
US19840585807 |
申请日期 |
1984.03.02 |
| 申请人 |
THE PERKIN-ELMER CORPORATION |
发明人 |
GAGNE, PETER H.;MORRISROE, PETER J. |
| 分类号 |
G01N21/73;H05H1/30;H05H1/36;H05H1/42;(IPC1-7):H05B31/26;H03H7/38 |
主分类号 |
G01N21/73 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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