| 发明名称 |
Process for forming protective film of organic polymer and boron |
| 摘要 |
A protective film having a very low coefficient of friction, a good wear resistance, a good adhesion, and prolonged lubricating and moisture-resistant properties is formed on a substrate by sputtering of a target consisting of at least one of organic polymers and at least one of boron compounds.
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| 申请公布号 |
US4629547(A) |
申请公布日期 |
1986.12.16 |
| 申请号 |
US19840671918 |
申请日期 |
1984.11.15 |
| 申请人 |
HITACHI, LTD. |
发明人 |
HONDA, YOSHINORI;KITOO, MAKOTO;KOKAKU, YUUICHI |
| 分类号 |
C23C14/34;C23C14/06;G11B5/84;G11B5/85;H01F41/18;(IPC1-7):C23C14/12;C23C14/18 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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