MANUFACTURE OF THICK FILM HYBRID INTEGRATED CIRCUIT

摘要

PURPOSE:To enhance an yield rate, by connecting a correcting circuit for a circuit block constituting a thick film hybrid integrated circuit to the circuit block through a thick film resistor that can be cut OFF, and selecting whether the correcting circuit is added to the circuit block or not depending on whether the thick film resistor is cut OFF or not. CONSTITUTION:In adjusting electric characteristics of a semiconductor IC 1, switches 2 and 6 are contacted to the side A. A signal vi, which is equal to a reference cutoff frequency f1, is inputted to an input terminal 4. An output vo is obtained from an output terminal 5. Based on the level of the output signal vo, response (b) between the input terminal 4 and the output terminal 5 is measured. When the response at the frequency f1 is larger than -3dB, the cutoff frequency is higher than the frequency f1. Therefore, an adjusting resistor 3 is trimmed so that the cutoff frequency is made to equal to an objective cutoff frequency fp. At this time, the characteristics between the input terminal 4 and the output terminals 5 becomes a characteristic curve C based on the synthesis of a characteristic curve E of the correcting circuit and a characteristic curve D of the semiconductor IC 1. When the response at the frequency f1 is smaller than -3dB, the switches 2 and 6 are closed to the side B. Then the characteristic of the semiconductor IC 1 becomes a characteristic curve B. The cutoff frequency becomes lower than the reference cutoff frequency f2. A capacitor 7 is cut OFF, and the characteristic of the correcting circuit become a characteristic curve F. The adjusting resistor 3 is trimmed, and a desired characteristic curve C is obtained. Thus the device, which conforms to the objective characteristics, can be manufactures at a good yield rate.