| 摘要 |
PURPOSE:To enable an image to be rotated arbitrarily with magnification left constant, and to facilitate conditioning setting of electron lenses for this image rotation, by rotating the image by changing each focal distance of magnetic field type electron lens in a group of plural lenses while the composition of respective focal distances between plural lenses in a group is substantially kept constant. CONSTITUTION:Exciting currents of all lenses including an image-formation lens system are controlled by CPU 25 so that they are outputted to current supply power sources 13-18 for the respective lenses. An electron beam deflector 12 is controlled by CPU, through an interface 24 and a supply power source 17, serving as a deflector with which the image in a transient state of image rotation is not formed on a fluorescent plate 10. A memory element 26 memorizes all exciting power and exciting polarity of each lens, necessary for image rotation, corresponding to the magnification and rotation angle. All control programs related to the operation of this electron microscope are also memorized in this memory element 26. An operation panel 27 is equipped with all of necessary knobs, switches, and the like, with the conditions of them being always read by CPU.
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