| 摘要 |
PURPOSE:To generate plasma discharge uniformly by providing plural electrode members having the ring-shaped groove parts via an insulator in a concentric ring- shape so that the groove parts are penetrated with a radiate magnetic field and controlling independently the discharge current of each electrode member. CONSTITUTION:A radiate closed magnetic field is formed by sticking tightly the respective magnets 2 to both the center of the top part and the outside periphery parts of a disk 1 made of a magnetic material and the target supporting members 3 made of the magnetic material are provided in a concentric ring-shape with the prescribed intervals in the top face sides of the magnets 2. The ring-shaped targets 4 having the nearly U-shaped grooves are fitted to the clearance parts of these supporting members 3 freely attachably and detachably via the insulators 5 and the groove parts are perforated with the magnetic fields. The electrodes 6 are respectively connected to the undersides of each target 4 and respectively connected to the independent discharge electric power sources 7 via the lead wires 8 and the cooling devices 9 are fitted to the undersides of each supporting member 3. By this constitution, plasma is uniformly generated by controlling individually the discharge current for each electrode member.
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