| 摘要 |
<p>PURPOSE:To provide a thermal head having good abrasion resistance and heat conductivity, by forming an abrasion resistant layer comprising an amorphous hard carbon membrane to a heat generator directly or through the other layer. CONSTITUTION:A glaze layer 2 having a thickness of about 60mum is formed to the surface of an alumina substrate 1 and a heat generator 3 is formed by sputtering Ta2N or NiCr. A two-layered electrode 4 comprising NiCr/Au is formed by vacuum vapor deposition. The amorphous hard carbon membrane of the abrasion resistant layer protecting the surface of the heat generator 3 is formed, for example, as follows. Methane gas is introduced from a gas introducing valve 25 to be uniformly blown to a substrate 24 from a gas blow- off port 24. A substrate 21 is placed on a plasma generating electrode 22 and, for example, power with high frequency of 13.56 MHz is applied to said electrode 22 from a power source 23 to generate plasma and the objective carbon membrane is deposited and formed on the substrate 21.</p> |
