发明名称 METHOD FOR CONTROLLING VACUUM EVAPORATING APPARATUS
摘要 PURPOSE:To improve the respondense of the temp. of a bath by adding heater power calculated so as to regulate the degree of opening of a shutter to a prescribed value to heater power corresponding to the extent of evaporation in a system for controlling the extent of evaporation and by raising the temp. of the bath. CONSTITUTION:A comparator 18 for comparing the degree of opening of a shutter calculates heater power B so as to regulate the degree of opening of a shutter 8 detected by a detector 16 to a prescribed value E and outputs the heater power B. A heater power controller 13 controls heater power so that the power is made equal to the sum of heater power A corresponding to the extent of evaporation and the heater power B calculated by the comparator 18. Other factors are controlled as controlled in a conventional control system. The respondense of the temp. of the bath is improved by the heater power B, the degree of opening of the shutter can be rapidly returned to the set value, and the temp. of the bath can be well adapted to the following change in the extent of evaporation.
申请公布号 JPS61284575(A) 申请公布日期 1986.12.15
申请号 JP19850127703 申请日期 1985.06.12
申请人 MITSUBISHI HEAVY IND LTD 发明人 TAUCHI KUNIAKI;KATO MITSUO;FURUKAWA HEIZABURO
分类号 C23C14/54 主分类号 C23C14/54
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