| 摘要 |
PURPOSE:To obtain a laser beam of homogeneous and stable mode by constructing the components of the flow of gas of the direction perpendicular to an optical axis of the components of the flow of the gas reversely at least two positions on an optical axis. CONSTITUTION:A high frequency high voltage is applied by a high frequency high voltage source 6 between metal electrodes 2 and 3. Since glasses 4, 5 are coated on the electrodes 2, 3, a voiceless discharge 7 is generated between the electrodes. A housing 1 is partitioned by a partition plate 16 to the right and left sides, the gas is passed by a blower 88 through a discharge space beforehand perpendicular to the paper shown by 12 in the right section, and passed by a blower 8 in a discharge space in the depthwise direction perpendicular to the paper shown by 11 in the left section. In other words, the gas flows are reverse in the right and left sides. While the gas is circulated, it is cooled by a heat exchanger 10, uniform exciting space of the light is obtained to provided a stable and homogeneous laser beam. |
