| 摘要 |
PURPOSE:To reduce the size of a sensor and to simplify a measuring system by integrating a diffraction grating and an analyzing functional element of the quantity of light on a substrate for ICs. CONSTITUTION:The diffraction grating 3 which has plural parallel slits 2 and is formed in a line is packaged at the equal intervals on the surface 1a of the substrate 1 for the ICs and the phototransistors 4 are integrated as the analyzing functional element of the quantity of light and fitted to the lower part of the intervals of the diffraction grating 3. The diffraction grating 3 sets a main lobe value of the transmitted waves from the slits 2 according to the frequency of the incident waves from a vertical direction by such constitution. Accordingly, the frequency can be detected by the voltage generating from the phototransistors 4 by the frequency of the incident waves. Hereby, the size of the sensor is reduced and the measuring system can be simplified.
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