| 摘要 |
PURPOSE:To attain a sufficient S/N and to perform high-precision measurement automatically by using the optical image of fluorescence from a resist and the optical image of the reflected light from a sample of an illuminating light. CONSTITUTION:Though an exciting light LA emitted from an exciting light source 12 and an illuminating light LB emitted from an illuminating light source 14 are reflected on a dichroic mirror 20 and a half mirror 30 respectively and are irradiated to a sample simultaneously, they are detected independently of each other as a fluorescence LC and an illuminating reflected light LD. They pass an image rotating prism 34 and a mirror 36, and their images are formed on a slit 44 by the second objective lens 38. The fluorescence LC is made incident on a detector 56 through the slit 44. The reflected light LD is reflected on the dichroic mirror above the slit 44, and a part of this light passes a half mirror 50 and is reflected on a mirror 46, and its image is formed on an image surface 66. The other part of the reflected light is reflected on the mirror 50 and is made incident on a detector 60. Detectors 56 and 60 output electric detection signals corresponding to quantities of incident light, and a signal processing means recognizes the pattern of the resist by these optical image data.
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