| 摘要 |
PURPOSE:To block flow in of dust through sliding door into the carrying path, in put-in/out device of carrying apparatus arranged in clean room, by discharging air in the groove portion of edge structural member of put-in/out device through discharging device. CONSTITUTION:It is comprising a carrying unit movable on a carrying path 1 surrounded by the circumferential wall 1a while provided with a put-in/out port 2 at proper position, an air cleaner 12 and a sliding door 2c for opening/ closing said port. Upon enerzination of discharging unit 14, the air in the groove section 2b is discharged through pump to clean environment. Consequently, dust produced through operation of the sliding door 2c is sucked together with the air in the moving path 1 and discharged through the groove section 2b. As a result, deterioration of cleanliness due to dust produced through operation of the sliding door 2c can be prevented to maintain necessary cleanliness easily.
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