| 摘要 |
PURPOSE:To inhibit mechanical loss by the index time minimally by providing a transfer means transferring a semiconductor element between one system and the other system before and behind a measuring section. CONSTITUTION:Measuring sections 2 testing the electric characteristics of semiconductor elements, feeding sections 1 feeding the semiconductor elements into the measuring sections 2 and housing sections 3 housing the semiconductor elements from the measuring sections 2 are changed into units, and the two systems A, B of the units are provided. Transfer means 4, 5 transferring the semiconductor elements between the system A and the system B are furnished before and behind the measuring sections 2. The transfer means 4, 5 are positioned in carrying paths for the semiconductor elements in several system A, B, have holding sections 8 and 9 each receiving the elements 6, 7, and have structure in which even elements fed from other systems are moved between the two systems A, B, and the elements are forwarded from the B system to the measuring section 2 for the A system even when the supply of the elements to the measuring section 2 for the A system is interrupted, and a simultaneously parallel test can be continued. Accordingly, mechanical loss by the index time can be inhibited minimally, thus improving operation efficiency.
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