| 摘要 |
PURPOSE:To attain to shorten a scanning time for measurement, by scanning a moving table so that the hole provided to an article to be measured is processed in a state divided into first and second scannings and extracting hole information from the informations obtained by first and second scannings. CONSTITUTION:When the edge of a sensor 2 is set to the inside of a hole 31 by the scanning of a moving table 4, the scanning of the hole 31 is performed so as to be divided into first and second scannings. If the hole 31 is detected by a detector 5 in the cooperation of the output of the sensor 2 and the move ment of the moving table 4 so that first and second scannings are not over lapped, the first and second scannings are connected to obtain the positional data of the hole 31. The coordinates Cx, Cy of the center C of the hole 31 and the inner diameter thereof are calculated on the basis of the positional data of the hole 31 by CPU6. As mentioned above, because the hole 31 can be measured without superposing the sensor 2 when the hole 31 resting on the edge of the sensor 2 is measured, a scanning time can be shortened and the efficiency of measuring operation can be enhanced.
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