| 摘要 |
PURPOSE:To obtain a tomographic image having high resolving power and to enable image pickup systems of both of a B-mode and a C-mode, by using the mechanical scanning of a Z-axis as the scanning for the B-mode in place of an A-mode wave form at the time of the changing-over of a scanning axis. CONSTITUTION:The converged beam 200, generated at a part where a sensor 210 transmits and receives an ultrasonic wave, is allowed to irradiate the specimen 60 on a specimen stand 70 and reflected therefrom. When a stand 70 and the Y-scanning stage 230 of the whole of a voice coil exciter 270 are subjected to parallel advance motion in a Y-direction while the stand 70 is parallelly advanced to an X-direction by the reciprocal motion of the voice coil exciter 270, a C-mode ultrasonic microscope is realized. Further, the function for applying parallel advance motion to the Z-axis stage 220 of the sensor 210 in an up-and-down direction, a stage 245 for rotating the stage 230 and the whole of the exciter 270 around the center of the sensor 210 and stages 240, 250 for roughly moving a stepping motor and the whole to X- and Y-directions are provided. The sensor 210 and the stage 220 are parallelly advanced and moved to a Z-direction while the stand 70 is parallelly and reciprocally moved to X- and Y-directions to obtain a B-mode image.
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