| 摘要 |
PURPOSE:To obtain a laser beam with a stable mode by composing a a plurality of pairs of electrodes of a gas laser apparatus of at least two types of electrodes which have different widths. CONSTITUTION:The width of a pair of electrodes 601 and 602 of a left side discharge tube 10 is made to be larger than the diameter of the discharge tube 10 and the width of a pair of electrodes 611 and 612 of a right side discharge tube 11 is made to be smaller than the diameter of the discharge tube 11. A discharge converged to the center is obtained in the right side discharge tube 11 and a discharge converged to both sides is obtained in the left side discharge tube 10. While the laser beam travels back and forth between a totally reflecting mirror 4 and a partially reflecting mirror 5, the effects of both discharges cancel each other. Therefore, this laser beam can be regarded as equivalent to the beam amplified by a homogeneous discharge 8 and the mode of the laser beam can be maintained stably. |
