| 摘要 |
PURPOSE:To maintain the optical axis of laser light always at a specified angle with an object by providing two sheets of mirrors in an optical path for the laser light and moving respectively rectilinearly the mirrors in different directions thereby scanning the laser light. CONSTITUTION:Laser light 2 irradiated in an x-axis direction by a laser oscillator 1 is reflected in a y-axis direction by the 1st mirror 15 and is further reflected in a z-axis direction by the 2nd mirror 16 so that the reflected light is made incident on a substrate 3. Since the mirror 15 moves in the x-axis direction, the light 2 scans on the substrate 3 at the speed thereof. The mirror 16 is then moved in the y-axis direction to irradiate the light 2 over the entire surface of the substrate 3 on a supporting table 4. The irradiating angle of the light 2 is maintained constant by small driving power without moving the table 4 according to such mechanism. The device is usable for melting by heating or cutting by heating, etc. of a semiconductor, etc. |
