MULTIPROBE TEST SYSTEM AND METHOD OF USING SAME

摘要

A multiprobe test system is disclosed for testing microcircuits which includes a printed circuit board having a plurality of data-detector probes attached for z-axis control and edge detection. The data-detector probes include a support body, and an arm supported by the body and attached thereto in an angular fashion. A probe tip in the form of a needle extends from and is attached to the arm. The probe tip includes a downwardly positioned point for contact with the surface having integrated circuits defined thereon. A force sensitive material is attached to but electrically isolated from the arm and has conductor leads extending therefrom. The force sensitive material comprises a piezoelectric material, for example. A detector circuit having a plurality of channels receives signals delivered by the force sensitive material of each data-detector probe enabling the monitoring of planarization of the data-detector probe tips as well as controlling the overtravel of the probe tip into the surface having integrated circuits defined thereon. A method of using the multiprobe test system having a probe card with a plurality of data-detector probes located thereon is also disclosed.