发明名称 Capacitive detector for absolute pressure
摘要 A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).
申请公布号 US4628403(A) 申请公布日期 1986.12.09
申请号 US19850701857 申请日期 1985.02.15
申请人 VAISALA OY 发明人 KUISMA, HEIKKI T.
分类号 H01H35/24;G01L9/00;(IPC1-7):G01L9/12;H01G5/16 主分类号 H01H35/24
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