| 摘要 |
PURPOSE:To simplify structure of a turbo molecular pump by installing a radial magnetic bearing in such a position as to face the inner peripheral surface of a rotor in the outer periphery of a motor housing. CONSTITUTION:Within a motor housing 2 containing a motor 5 for giving rotational driving force to a rotor shaft 4, a thrust magnetic shaft 6 supporting a rotor 3 in the axial direction is installed. Also, radial magnetic bearings 10, 11 are placed on the outer peripheral side of the motor housing 2. Accordingly, it is possible to provide the equipment with merits of the shaft-rotating formula and those of the shaft-fixed, rotor-revolving formula at the same time. Furthermore, the equipment can be of smaller and simpler structure.
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