| 摘要 |
PURPOSE:To prevent the clogging of both a filter and the inside of a sampling route due to a residual plating liquid in the suspension period of an analysis by providing a prescribed sampling route wherein the plating liquid is continuously sent to an analyzer and enabling a filtrate to be used in the washing of a filter. CONSTITUTION:The analyzer for the plating liquid has a sampling route provided with a flowmeter 3 measuring a filtrate passed through a filter 2, a storage tank 6, a pure water tank 7 and a control valve mechanism. One part of the plating liquid is continuously sent to the analyzer 5 via the filter 2 through this sampling route. Also when the measured value of the above- mentioned flowmeter 3 does not reach a prescribed value, a storage liquid is flowed backward to the filter 2 as a washing liquid by means of the above- mentioned control mechanism and pure water is circulated through the sampling route in the suspension period of the analysis. |
