| 摘要 |
PURPOSE:To improve the electrical, optical and mechanical characteristics of the resulting film by introducing a compound contg. Ge and halogen and active species of a compound contg. Ge into a film forming space and by applying heat energy to bring them into a reaction. CONSTITUTION:Active species are produced from a compound contg. Ge for film formation. The compound interacts chemically with a compound contg. Ge and halogen such as a compound represented by a formula GeuY2u+2 (where u is an integer of >=1 and Y is F, Cl, Br or I). The active species and the compound contg. Ge and halogen are introduced into a film forming space, where they are brought into a chemical reaction by applying heat energy to form a deposited film on a substrate. |
