| 摘要 |
PURPOSE:To facilitate automatic corrections of alignment control by comparing outputs of detectors which detect reflected light from plural divided areas of a marker pattern and calculating and correcting a deviation in alignment in a substrate. CONSTITUTION:Aligning substrates 1 and 2 are mounted on a moving stage 3; and one moving-side substrate 1 is provided with the window 1-1 of a photodetection area for a light source 4 and the other fixed-side substrate 2 is provided with the marker 2-1 which reflects or transmits light source light 4 at a position corresponding to the window 1-1. The pattern of the marker 2-1 is divided into four parts A, B, C, and D according to its symmetry and a photodetector 5 which detects the quantity of pattern reflected light is ar ranged for each divided area. Outputs of those photodetectors 5 are compared with one another to easily calculate and correct the shift in position between the substrates 1 and 2 extremely easily. |
