| 摘要 |
PURPOSE:To improve the definition of an optical projection image and to facilitate assembly by forming a mesh electrode which is supplied with a modulated signal directly on a dielectric mirror film adhered to one surface of a thin crystal plate. CONSTITUTION:The 1st conductive layer 281 of the 2nd grid 28 is formed directly on the dielectric mirror film 4 of a target 2 and an insulating layer 27 and the 2nd conductive layer 282 are formed in a mesh shape on the layer 281 by lithography. The layer 281 is connected to the transparent conductive film 5 of the target 2 by a conductor 19. The layer 282 faces the film 4 and is used as the mesh electrode of the grid 28 and a video signal is impressed between the layer and electrode. Consequently, the mesh electrode faces the film 4 across the layer 27 while maintaining a specific distance easily and the layer 281 shields it opposite thin crystal plate 3 partially. Consequently, deterioration in resolution due to a secondary electron is suppressed and the fineness of the mesh is improved, so the optical projection image of high definition is obtained. Further, the assembly is facilitated.
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