| 摘要 |
PURPOSE:To drive respective optical shutters with a low voltage independently of one another by arraying dot parts of an optical shutter which has a transparent ceramic plate with electrooptic effect and electrode provided on both side thereof at specific intervals. CONSTITUTION:A transparent electrode 12 is formed on a quartz glass substrate 13 by sputtering ITO as shown by an optical shutter array cross figure and the transparent ceramic plate 11 (PLZT/9/65/35 ceramic substrate) provided with ITO as the transparent electrode 12 is stuck on its surface with an adhesive. Then, separation grooves of about 10mum in width are formed by a dicing saw, a heat treatment is carried out in a Pb atmosphere so as to remove work strain, and then the separation grooves are filled with resin for reinforcement.
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