| 摘要 |
PURPOSE:To inhibit heat from being conducted in parallel direction to a silicon substrate provided with a gas sensing part and its peripheral circuit, etc., and to integrate a peripheral circuit, etc., by forming a comb-line heat radiation part where >=1 projection and recess are worked finely between function parts on a silicon substrate. CONSTITUTION:The comb-line heat radiation part 6 where >=1 projection and recess are worked finely is provided between the gas sensing part composed of the gas sensing film 5, heater 4, and their electrode 2 of a gas sensor prepared on the silicon substrate by fine working and the peripheral circuit part which processes information from it or a sensor part with another function. Thus, the heat radiation part 6 is provided to reduce heat conduction parallel to the substrate 1. Consequently, a sensor having another function can be integrated on the same substrate with the gas sensor which requires the heater. Further, a fine multifunctional micro gas sensor which is small in power consumption is obtained.
|
