| 摘要 |
PURPOSE:To facilitate a measuring operation by treating bodies to be treated automatically and successively on the basis of a card in which specification is recorded and measuring the removed amount of treated bodies automatically during the treatment. CONSTITUTION:When a body 37 to be treated is carried to a treating tank 34 and dipped in processing solution 35 together with a cage 36 for treatment, a removed amount measuring instrument operates and a probe 38 measures the removed amount in the treated body 37. Measurement information is transmitted through a cable 41 and a removed amount measuring instrument and A/D-converted and the result is transmitted to the CPU of a control board to control the removed amount. When necessary removal is finished, the cage 36 and treated body 37 are lifted from the tank 34 and processing solution 35 on the surface of the treated body 37 is washed away to complete the treatment. Those operations are carried out by confirming information written on the card and generating a treatment schedule on the basis of substrate information for treatment recorded in a CPU when the information written on the card is correct.
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