发明名称 FLOW CONTROLLING METHOD OF CORPUSCULAR FLOW
摘要 PURPOSE:To regulate a state of contact between a gaseous molecule and a corpuscule accurately, by controlling the length of a flow passage at the downstream side of a contraction-expansion nozzle being installed in the flow passage. CONSTITUTION:A contraction-expansion nozzle 1 being installed in a flow passage is gradually throttle in its opening area toward an intermediate part from an inflow port 1a, coming to a throat part 2, while its opening area is gradually expanded toward an outflow port 1b from this throat part 2. A degree of contact of a corpuscule with a gaseous molecule while being transferred inside a downstream chamber 4 is controlled by what the length of a flow passage inside this downstream chamber 4 is regulated. Control of the passage length is carried out with a base body 6 moved in a passage direction. Therefore, a state of contact between the gaseous molecule and the corpuscule is accurately regulable.
申请公布号 JPS61274106(A) 申请公布日期 1986.12.04
申请号 JP19850115360 申请日期 1985.05.30
申请人 CANON INC 发明人 CHIBA YUJI;ANDO KENJI;MASAKI TATSUO;SUGATA MASAO;OSABE KUNIJI;KAMIYA OSAMU
分类号 F15D1/08;F15D1/02 主分类号 F15D1/08
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