| 摘要 |
PURPOSE:To detect with a single specimen-detecting part rotary motion and linear motion in the thrust direction, by installing grate-shape fringes on the detecting port and arranging a detecting unit in the thrust as well as peripheral direction relative to a shaft of a cylindrical specimen detecting part respectively. CONSTITUTION:A cylindrical detecting unit 10 is supported on the central shaft through a shaft 9 tree to rotate and travel linearly. Further, on the outside periphery of this detecting unit 10, a fringe pattern in grate-shape is printed. The length in the thrust direction of light-receiving elements 11a, 11b detecting the rotary motion is a product by integer of the pitch in the thrust direction of the grate-shape pattern of the detecting unit. The length in the peripheral direction of the light-receiving elements 11c, 11d detecting the linear motion in the thrust direction is a product by integer of the pitch in the rotating direction of the grate-shape pattern.
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