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发明名称
PROCESS FOR THE MANUFACTURE OF SILICON
摘要
申请公布号
EP0123100(B1)
申请公布日期
1986.12.03
申请号
EP19840102705
申请日期
1984.03.13
申请人
BAYER AG
发明人
WODITSCH, PETER, DR.;ABELS, MARTIN;BRAZEL, BERTHOLD, DR.
分类号
C01B33/02;C01B33/027;C01B33/033;(IPC1-7):C01B33/02;H01L31/18
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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