| 摘要 |
PURPOSE:To enhance adhesion between an amorphous silicon layer and a substrate by forming an interlayer made of silicide between the substrate and the amorphous layer. CONSTITUTION:The interlayer 3 made of silicide is formed between the substrate 2 and an amorphous a-Si layer 4, and said silicide is composed of an alloy of silicon and a metal, and when the a-Si layer 4 having the same silicon atom is deposited on the silicide interlayer 3, adhesion is enhanced. Since both have the same coordination number of 4 from the view point of matching of lattice constant, a density of traps for photocarriers decreases in these interface, and electrophotographic characteristics is enhanced. |
