发明名称 |
Apparatus for chopping a charged particle beam |
摘要 |
An apparatus for chopping a charged particle beam comprises: deflecting means for deflecting a charged particle beam by a high frequency voltage; deflecting means for deflecting the charged particle beam by a DC voltage or low frequency saw-tooth voltage in the same deflecting direction as the high frequency deflecting means does; and aperture means for taking out only a part of the charged particle beam deflected. The generation time point of the pulse beam which is generated at a high frequency is arbitrarily adjusted by the DC voltage or low frequency saw-tooth voltage.
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申请公布号 |
US4626690(A) |
申请公布日期 |
1986.12.02 |
申请号 |
US19840672203 |
申请日期 |
1984.11.16 |
申请人 |
HITACHI, LTD. |
发明人 |
TODOKORO, HIDEO;KOMODA, TSUTOMU |
分类号 |
H01J37/09;H01J37/04;H01J37/147;H01J37/28;(IPC1-7):H01J3/14 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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