| 摘要 |
PURPOSE:To obtain a metal foil having fine apertures with good accuracy by printing a pattern on a resin layer sensitive to far ultraviolet rays formed on a substrate; developing the pattern; growing a metal layer on the exposed substrate; and removing the resin layer. CONSTITUTION:Electrically conductive substrate 4 is coated with resin such as polymethyl methacrylate sensitive to electromagnetic waves such as far ultraviolet rays of wavelengths below 3000 Angstrom , and a pattern is printed using the electromagnetic waves. The pattern is then developed with a poor solvent such as methyl isobutyl ketone to expose the substra te surface to be exposed > Metal foil layer 6 equal to or thinner than the thickness of the resin image is formed by plating, etc., the image is dissolution removed with a good solvent such as ethyl acetate, and layer 6 is detached from substrate 4. Part of substrate 4 may be eliminated by etching to obtain a metal foil having apertures suitable for use as a mask for electron beams, etc. |
