| 摘要 |
PURPOSE:To improve the level precision of a refrigerant and a measured value of the amount of adsorption without causing the vaporized refrigerant to disorder the refrigerant level by arranging a vapor-liquid separator in the middle of a transport pipe and discarding the vapor part of the refrigerant before a dewer bottle. CONSTITUTION:When a controller 8 drives a motor 9 for a specific time with a signal from a liquid level sensor 10, a bellows 7 expands or shrinks to increase or decrease pressure to the external pipe of a siphon 6. When the pressure is reduced, a valve 14 is open and a valve 16 is closed, so LN2 in a storage tank 3 enters the external pipe. Then, the pressure to the external pipe is increased, the valve 14 is closed and the valve 16 is open, so LN2 in the external pipe enters the transport pipe 4 through an internal pipe and guided to the vapor-liquid separator 5. Even if the LN2 is vaporized in the transport pipe 4, it is discharged from a discharge port 5a, so only LN2 is guided into the dewer bottle 2 through a transport pipe 4'. Therefore, the vaporized LN2 never disorders the liquid level and the liquid level precision and the reliability of a measured value of the amount of adsorption are improved.
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