| 摘要 |
PURPOSE:To produce the titled magnetic recording medium having excellent wear resistance by forming a magnetic layer on a nonmagnetic substrate, sending a Co vapor flow over the surface of the magnetic layer, irradiating an electron beam into the vapor flow and forming a cobalt oxide film on the surface of the magnetic layer. CONSTITUTION:The inside of a vacuum vessel 7 is evacuated by an evacuation device 11 and a magnetic layer is formed on the surface of a long-sized nonmagnetic material to obtain a substrate 2 which is wound around a can 1 in the vessel 7 and rotated. Activated gaseous oxygen is introduced into a Co vapor flow 4 coming out from a vaporization source 3 which has been heated by an electron gun 13, the incident angle is controlled by a mask 12 and a cobalt oxide film having excellent resistance to wear and impact is formed on the substrate 2. Thermoelectrons are generated from a filament 8 in an electron beam irradiation device 6 by the activated gaseous oxygen, accelerated by an anode 9 impressed with a voltage and irradiated on the gaseous oxygen introduced from a gaseous oxygen introducing pipe 5. Consequently, the gaseous oxygen is excited and ionized.
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