| 摘要 |
PURPOSE:To improve the water saving effect even in either case where a washing vessel is totally used or it is selectively used by a method wherein, when a plurality of wafer washing vessels are connected to a water service pipe through the intermediary of an electromagnetic valve, a replaceable orifice is attached between each washing vessel and the water plug provided thereon. CONSTITUTION:The main pipe 2 and an electromagnetic valve 3 are series connected to a water services pipe 1, a plurality of exhaust pipes 4 are connected to them, and washing vessels 6 are attached to the tip of the exhaust pipes 4 through the intermediaries of water plugs 5 and pipes 10. Said washing vessels 6 are formed in the same type, washing fluid is poured up therein, and washing baskets 8 containing a plurality of wafers are hung down. According to this constitution, flanges 4a and 10a are provided on the exhaust pipes 4 and the pipes 10, and orifices 11 having a throttling hole 11 are inserted between the flanges 4a and 10a, and the end part of the orifices 11 is clamped with a bolt 12. At this time, the orifices 11 are brought in the state wherein they are replaced with the orifices having the clamping diameter different from that of the orifices 11. Also, the entire or a part of the vessel 6 is selectively used as occasion demands. |
