| 摘要 |
PURPOSE:To permit a better etching while elevating the adhesivity of an Nb or Nb compound layer, by forming a very thin metal oxide film right below an Nb or Nb compound superconductor. CONSTITUTION:A fluxmeter is made up of a tunnel type Jesephson junction with an Nb or Nb compound superconductor as ground electrode 4 and a Pb alloy, Nb or Nb compound superconductor as opposed electrode 9, an input coil comprising an Nb or Nb compound superconductor, a feedback coil 7 and a main coil 4'. First, a metal very thin film is formed right below the Nb or Nb compound superconductor and then, the metal very thin film is oxidized after the dry etching of the Nb or Nb compound superconductor or prior to the accumulation of the Nb or Nb compound superconductor. Moreover, a patterning is done for the nb or Nb compound superconductor accumulated on the metal very thin film or on the very thin metal oxide film obtained by the oxidation of the very thin metal film.
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