| 摘要 |
PURPOSE:To reduce cost by covering a material to be formed as an optical waveguide which allows transmission of light at a low loss with a material which reflects light at low loss without using a costly semiconductor single crystal wafer. CONSTITUTION:For example, blue sheet glass, white sheet glass, molten quartz or the like is used for a substrate 1 and a metallic film 2 deposited by evaporation is selectively formed on the part of the substrate 1 to be used as the bottom of an optical guide. A material which does not change in the stage of forming a material 4 to be used as an optical waveguide, for example, Ni, Cr, W, Mo, Ti, N, Ta or the like which does not change at the forming temp. of SiO2 or during glow discharge if the material 4 is SiO2 is used for the film 2. Another metallic film 15 to be deposited by evaporation is formed on the film 2 so as to overlap partly or wholly thereon. A material which is liable to diffuse during or after the formation of the material 4 is selected for the film 15 and is diffused into the material 4, by which a diffused layer 5 to serve as a wall of the optical waveguide is formed. A metallic film 3 deposited by evaporation so as to be used as a cap is then formed. The optical waveguide which can transmit efficiently light is thus manufactured inexpensively. |
