| 摘要 |
PURPOSE:To efficiently obtain fine powder of a Ti alloy occluding a large amount of hydrogen by bringing Ti and Cu vapors or Ti, Cu and Si vapors into a reaction in plasma generated in a vacuum vessel. CONSTITUTION:A vacuum vessel 6 is evacuated. Confronting Cu electrodes 3, 3 energized by an RE power source 1, a meshy auxiliary electrode 8 and a heater 7 are arranged in the vessel 6. Ar for generating arc, TiCl4 and SiF4 are introduced into the vessel 6 from feed sources through mass flowmeters MFC and a nozzle 10, and plasma is generated in the vessel 6 to decompose the TiCl4 and SiF4. Cu vapor produced from the heated Cu electrodes 3 is reacted with the resulting Ti and Si and alloyed. Fine powder of a Ti alloy formed by the alloying is sucked and recovered with a trap 4.
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